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Nanolithography

Impact of Parameter Variation in Fabrication of Nanostructure by Atomic Force Microscopy Nanolithography

Arash Dehzangi, Farhad Larki, Sabar D. Hutagalung, Mahmood Goodarz Naseri, Burhanuddin Y. Majlis, Manizheh Navasery, Norihan Abdul Hamid, Mimiwaty Mohd Noor

published 11 Jun 2013

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