Fig 1.
Schematic diagram of the six-Axis precision alignment platform structure.
Fig 2.
Schematic diagram of XXY platform.
(a) Platform at Rest. (b) Platform in Rotation.
Fig 3.
XXY rotation coordinate diagram.
Fig 4.
Flowchart of image processing.
Fig 5.
Image localization process flowchart.
Fig 6.
Schematic diagram of image positioning coordinates.
Fig 7.
Rotation angle error between the target object and the object to be aligned.
Fig 8.
Construction of six-axis precision alignment platform.
Fig 9.
The connection diagram between the driver board and the motion control board.
Fig 10.
Diagram of the pneumatic system installed on the XYZ platform.
(a) Object suction device of the XYZ alignment platform. (b) Pneumatic interface circuit design diagram.
Fig 11.
Human-Machine Interface for the Six-Axis Precision Alignment Platform.
(a) Image Recognition Interface. (b) Multi-axis control motion interface.
Fig 12.
Open-loop identification response diagram of the motor system.
Fig 13.
Block diagram of the MDDS control method for the i-th Axis.
Fig 14.
Block diagram of the PID control method for the i-th axis.
Fig 15.
Stepper motor speed trajectory curve.
Fig 16.
Motion control diagram of the six-axis precision alignment platform.
Table 1.
Experimental control parameters.
Fig 17.
Axial movement trajectory in the Point-to-Point control experiment.
(a) X1-axis. (b) X2-axis. (c) Y-axis.
Fig 18.
Axial position error in the Point-to-Point control experiment.
(a) X1-axis. (b) X2-axis. (c) Y-axis.
Fig 19.
Diagram of each axial movement trajectory.
(a) X1-axis. (b) X2-axis. (c) Y-axis.
Fig 20.
Axial position error in the trajectory tracking control experiment.
(a) X1-axis. (b) X2-axis. (c) Y-axis.
Fig 21.
Trajectory and velocity curves of each axis in the XYZ Platform.
(a) X-axis. (b) Y-axis. (c) Z-axis.
Fig 22.
Testing of image-based positioning and human-machine interface.
(a) start of positioning. (b) end of positioning.
Fig 23.
Image-Based Positioning and Motion Control Process of the Six-Axis Precision Alignment Platform from (a) to(d).
Fig 24.
Target Coordinate Diagram.
Fig 25.
Axial Trajectory Diagram of Image Positioning.
(a) X1-axis. (b) X2-axis. (c) Y-axis.
Fig 26.
Axial position error in the trajectory tracking control experiment based on image positioning.
(a) X1-axis. (b) X2-axis. (c) Y-axis.