Fig 1.
The electric field vs. polarization curves of PZT film as a function of electric field amplitude.
The inset figure illustrates the inhomogeneous structure of the tested PZT film composite.
Fig 2.
The load-depth curves of the PZT film composite as a function of temperature.
Fig 3.
Topography micrographs of indentation impressions at 24°C, 200°C, 300°C, and 380°C.
The cross-section curves of the indentation impressions were also plotted as inset figures.
Fig 4.
The load-depth curve of PZT film composite under partial unloading function at 24°C.
Fig 5.
Reduce modulus vs. contact depth curves (A), and hardness vs. contact depth curves of PZT film composite measured at different temperature (B).
Fig 6.
The true modulus of PZT film composite vs. contact depth at different temperature.
Fig 7.
True modulus of the PZT film composite vs. maximum indentation depth curves at different temperature (a), and hardness vs. contact depth curves of the PZT film composite at different temperature.
The black dots represent the experimental results (b). The red lines in Fig. 7A and Fig. 7B represent the fitting results by equation 6 and equation 9, respectively.
Table 1.
The calculated Young’s modulus and Hardness of the PZT film and the substrate at different temperature.
Fig 8.
The load-depth curves of the PZT film composite at different pre-load states.
The inset figure shows the loading stage.