Figure 1.
PDMS membrane that was warped when hexane-diluted PDMS was spun onto it.
The triangular elements are metal that was plated on the underlying PDMS membrane.
Table 1.
Swelling in the thickness of cured PDMS after soaking in 3 different solvents for 2 hours.
Figure 2.
Thickness of the PDMS film under various concentrations (by weight) of PDMS in tert-butyl alcohol (TBA) as a function of spin speed.
Each data point is the average of the mean thickness of three slides. Each slide was spun for 5 min. The error bar is the 95% confidence interval. The line is the least-squares fit of the data. The density of TBA is 0.775 g/mL at 25°C.
Table 2.
Constants in the mathematical relationship between spin speed and PDMS film thickness.
Figure 3.
Thickness of the 100% PDMS film under two different spin speeds as a function of spin time.
Each data point is the average of the mean thickness of three slides. The error bar is the 95% confidence interval. Each curve is a plot of Equation (2) for the given speed.
Table 3.
Thickness of PDMS films spun on glass substrates vs. PDMS substrates.
Figure 4.
Profiles of five PDMS membranes spun for 5 min on glass.
Each profile is a single sample, ending in the edge bead. The profiles in Figure 4 were measured from the center point of the slide to the edge along the long axis as indicated by the “Profile line” in Figure 5.
Figure 5.
Diagram of points on the slide were thickness measurements were taken.
The thickness of the film on each slide was calculated as the mean of the thicknesses of points A–D. The profile was generated by measuring the thickness at points spaced 1 mm apart (or less near the edge) along the profile line.