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A hybrid system for detecting semiconductor wafer defects using modified MobileNet with multi-head attention

Fig 5

Defect and non-defect wafer map patterns before histogram equalization.

Notes: (i) Center (ii) Donut (iii) Edge local (iv) Edge ring (v)Local (vi) Near full (vii) Random (viii) Scratch (ix) None.

Fig 5

doi: https://doi.org/10.1371/journal.pone.0346595.g005