A versatile cryo-transfer system, connecting cryogenic focused ion beam sample preparation to atom probe microscopy
Fig 2
The cryo stage and FIB transfer device (FIBTD) enable characterization, sample preparation and transfer at cryogenic conditions.
a) A custom 54° pre-tilted FIB cryo-shuttle mounted on the Quorum cryo-stage with key components and directions labeled. b) Rendered CAD drawing of the FIBTD indicating the flexible bellows coupling, 1, and the two possible connection points for the actively cooled transfer device (ACTD). c) The FIBTD connects directly to the existing FIB load-lock. d) The non-pre-tilted (top) and 54° pre-tilted FIB cryo-shuttles (bottom) attach to the end of the FIBTD with a bayonet connection and are thermally-isolated from the transfer rod with a polyether ether ketone end-component, 2.