Multilevel-3D Bit Patterned Magnetic Media with 8 Signal Levels Per Nanocolumn
Figure 3
ML-3D BPM media fabrication process.
(a) Sputter-deposition of the triple-stack ML-3D magnetic media composition (b) Spin-coat and bake HSQ (c) E-beam lithography (expose and develop patterns) (d) ICP etching of the naturally oxidized Ti layer (e) Ar-ion milling of the remaining composition to form the triple-stack ML-3D BPM.