Etching characteristics and profile simulation of silicon

• Hui Zhang ,

  Roles Conceptualization, Data curation, Formal analysis, Funding acquisition, Investigation, Methodology, Project administration, Resources, Validation, Writing – original draft, Writing – review & editing

  * E-mail: zhanghui_ccc@163.com

  Affiliations Industrial Perception and Intelligent Manufacturing Equipment Engineering Research Center of Jiangsu Province, Nanjing University of Industry Technology, Nanjing, Jiangsu, China, The Southeast University, Nanjing, Jiangsu, China

  https://orcid.org/0000-0003-1707-4500

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• Pengpeng Cai

  Roles Data curation, Software, Supervision

  Affiliation The Southeast University, Nanjing, Jiangsu, China

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