A low-noise silicon nitride nanopore device on a polymer substrate

• Wook Choi,

  Roles Data curation, Investigation, Writing – original draft

  Affiliation School of Mechanical Engineering, College of Engineering, Korea University, Anam-Dong, Seongbuk-Gu, Seoul, Korea

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• Eun-Seok Jeon,

  Roles Investigation, Software

  Affiliation School of Mechanical Engineering, College of Engineering, Korea University, Anam-Dong, Seongbuk-Gu, Seoul, Korea

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• Kyoung-Yong Chun,

  Roles Formal analysis, Project administration, Validation

  Affiliation School of Mechanical Engineering, College of Engineering, Korea University, Anam-Dong, Seongbuk-Gu, Seoul, Korea

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• Young-Rok Kim,

  Roles Project administration, Supervision, Writing – review & editing

  Affiliation Institute of Life Sciences and Resources and Department of Food Science and Biotechnology, College of Life Sciences, Kyung Hee University, Yongin, Korea

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• Kyeong-Beom Park,

  Roles Data curation, Investigation, Visualization

  Affiliation Department of Materials Science and Engineering, Seoul National University, Seoul, Korea

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• Ki-Bum Kim,

  Roles Conceptualization, Writing – review & editing

  Affiliation Department of Materials Science and Engineering, Seoul National University, Seoul, Korea

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• Chang-Soo Han

  Roles Conceptualization, Funding acquisition, Investigation, Methodology, Project administration, Validation, Writing – original draft, Writing – review & editing

  * E-mail: cshan@korea.ac.kr

  Affiliations School of Mechanical Engineering, College of Engineering, Korea University, Anam-Dong, Seongbuk-Gu, Seoul, Korea, Institute of Life Sciences and Resources and Department of Food Science and Biotechnology, College of Life Sciences, Kyung Hee University, Yongin, Korea

  http://orcid.org/0000-0002-1927-9422

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