Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites

Open Access

Peer-reviewed

Research Article

Khaled Sayed Elbadawi Ramadan,

Affiliation Department of Electrical and Computer Engineering, University of Alberta, 9211—116th St, Edmonton, Alberta, T6G 2V4, Canada
⨯
Stephane Evoy

* E-mail: sevoy@uaberta.ca

Affiliation Department of Electrical and Computer Engineering, University of Alberta, 9211—116th St, Edmonton, Alberta, T6G 2V4, Canada
⨯

Reader Comments (0)

Chemical deposition
Is the Subject Area "Chemical deposition" applicable to this article?

Thanks for your feedback.
Aluminum
Is the Subject Area "Aluminum" applicable to this article?

Thanks for your feedback.
Crystallization seeding
Is the Subject Area "Crystallization seeding" applicable to this article?

Thanks for your feedback.
Thin films
Is the Subject Area "Thin films" applicable to this article?

Thanks for your feedback.
Nanocomposites
Is the Subject Area "Nanocomposites" applicable to this article?

Thanks for your feedback.
Capacitors
Is the Subject Area "Capacitors" applicable to this article?

Thanks for your feedback.
Dielectrics
Is the Subject Area "Dielectrics" applicable to this article?

Thanks for your feedback.
Mechanical stress
Is the Subject Area "Mechanical stress" applicable to this article?

Thanks for your feedback.