Exploiting the Oxygen Inhibitory Effect on UV Curing in Microfabrication: A Modified Lithography Technique

Open Access

Peer-reviewed

Research Article

Jafar Alvankarian ,

* E-mail: alvankarian@gmail.com

Affiliation Institute of Microengineering and Nanoelectronics, National University of Malaysia, Bangi, Selangor, Malaysia
⨯
Burhanuddin Yeop Majlis

Affiliation Institute of Microengineering and Nanoelectronics, National University of Malaysia, Bangi, Selangor, Malaysia
⨯

Reader Comments (0)

Oxygen
Is the Subject Area "Oxygen" applicable to this article?

Thanks for your feedback.
Microstructure
Is the Subject Area "Microstructure" applicable to this article?

Thanks for your feedback.
Ultraviolet radiation
Is the Subject Area "Ultraviolet radiation" applicable to this article?

Thanks for your feedback.
Microfluidics
Is the Subject Area "Microfluidics" applicable to this article?

Thanks for your feedback.
Polymerization
Is the Subject Area "Polymerization" applicable to this article?

Thanks for your feedback.
Manufacturing processes
Is the Subject Area "Manufacturing processes" applicable to this article?

Thanks for your feedback.
Polymers
Is the Subject Area "Polymers" applicable to this article?

Thanks for your feedback.
Scanning electron microscopy
Is the Subject Area "Scanning electron microscopy" applicable to this article?

Thanks for your feedback.