Similarity Ratio Analysis for Early Stage Fault Detection with Optical Emission Spectrometer in Plasma Etching Process

Open Access

Peer-reviewed

Research Article

Jie Yang ,

* E-mail: jie.yang6@mail.dcu.ie

Affiliation Energy and Design Lab, School of Electronic Engineering, Dublin City University, Dublin, Ireland
⨯
Conor McArdle,

Affiliation Energy and Design Lab, School of Electronic Engineering, Dublin City University, Dublin, Ireland
⨯
Stephen Daniels

Affiliation Energy and Design Lab, School of Electronic Engineering, Dublin City University, Dublin, Ireland
⨯

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Optical materials
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