Impact of Parameter Variation in Fabrication of Nanostructure by Atomic Force Microscopy Nanolithography

• Arash Dehzangi ,

  * E-mail: mrsabar@eng.usm.my (SDH); arashd53@hotmail.com (AD)

  Affiliation Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor, Malaysia

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• Farhad Larki,

  Affiliation Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor, Malaysia

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• Sabar D. Hutagalung ,

  * E-mail: mrsabar@eng.usm.my (SDH); arashd53@hotmail.com (AD)

  Affiliation School of Materials and Mineral Resources Engineering, Universiti Sains Malaysia, NibongTebal, Penang, Malaysia

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• Mahmood Goodarz Naseri,

  Affiliations Department of Physics, Faculty of science, Universiti Putra Malaysia, Serdang, Selangor, Malaysia, Department of Physics, Faculty of Science, Malayer University, Malayer, Hamedan, Iran

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• Burhanuddin Y. Majlis,

  Affiliation Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor, Malaysia

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• Manizheh Navasery,

  Affiliation Department of Physics, Faculty of science, Universiti Putra Malaysia, Serdang, Selangor, Malaysia

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• Norihan Abdul Hamid,

  Affiliation Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor, Malaysia

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• Mimiwaty Mohd Noor

  Affiliation Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor, Malaysia

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