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High-Resolution, High-Throughput, Positive-Tone Patterning of Poly(ethylene glycol) by Helium Beam Exposure through Stencil Masks
- Eliedonna E. Cacao,
- Azeem Nasrullah,
- Tim Sherlock,
- Steven Kemper,
- Katerina Kourentzi,
- Paul Ruchhoeft,
- Gila E. Stein,
- Richard C. Willson
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- Published: May 24, 2013
- https://doi.org/10.1371/journal.pone.0056835