3D Active Stabilization System with Sub-Micrometer Resolution

• Olli Kursu ,

  Contributed equally to this work with: Olli Kursu, Tuomas Tuukkanen

  Affiliation Department of Electrical and Information Engineering and Infotech Oulu, Electronics Laboratory, University of Oulu, Oulu, Finland

  ⨯
• Tuomas Tuukkanen ,

  Contributed equally to this work with: Olli Kursu, Tuomas Tuukkanen

  Affiliation Department of Physics, University of Oulu, Oulu, Finland

  ⨯
• Timo Rahkonen,

  Affiliation Department of Electrical and Information Engineering and Infotech Oulu, Electronics Laboratory, University of Oulu, Oulu, Finland

  ⨯
• Mikko Vähäsöyrinki

  * E-mail: mikko.vahasoyrinki@oulu.fi

  Affiliation Department of Physics, University of Oulu, Oulu, Finland

  ⨯