Michaelis–Menten kinetics during dry etching processes

Open Access

Peer-reviewed

Research Article

About the Authors

Rimantas Knizikevičius

Roles Conceptualization, Formal analysis, Investigation, Methodology, Resources, Validation, Writing – review & editing

Affiliation Department of Physics, Kaunas University of Technology, Kaunas, Lithuania

The author has declared that no competing interests exist

Desorption
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Partial pressure
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Activation energy
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Germanium
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Graphs
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Enzymes
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Reactants
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Reaction time
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