http://orcid.org/0000-0002-6241-1687
About the Authors
- Shubin Zhang
-
Roles Conceptualization, Data curation, Formal analysis, Investigation, Methodology, Software, Validation, Visualization, Writing – original draft, Writing – review & editing
Affiliation MEMS Center, Harbin Institute of Technology, Harbin, China
- Yufeng Zhang
-
Roles Conceptualization, Funding acquisition, Methodology, Project administration, Resources, Supervision, Validation, Writing – review & editing
* E-mail: yufeng_zhang@hit.edu.cn
Affiliations MEMS Center, Harbin Institute of Technology, Harbin, China, Key Laboratory of Micro-Systems and Micro-structures Manufacturing, Ministry of Education, Harbin, China
- Junyu Chen
-
Roles Data curation, Formal analysis, Investigation, Software, Writing – review & editing
Affiliation MEMS Center, Harbin Institute of Technology, Harbin, China
- Xuelin Zhang
-
Roles Validation, Visualization
Affiliation MEMS Center, Harbin Institute of Technology, Harbin, China
- Xiaowei Liu
-
Roles Funding acquisition, Project administration
Affiliations MEMS Center, Harbin Institute of Technology, Harbin, China, Key Laboratory of Micro-Systems and Micro-structures Manufacturing, Ministry of Education, Harbin, China
Competing Interests
The authors have declared that no competing interests exist.