A hybrid system for detecting semiconductor wafer defects using modified MobileNet with multi-head attention
Fig 7
Histogram of equalized and un-equalized defective images.
Notes: (a) histogram of unequalized Center defect image; (b) histogram of equalized Center defect image; (c) histogram of unequalized Edge-Local defect image; (d) histogram of equalized Edge-Local defect image; (e) histogram of unequalized Edge-Ring defect image; (f) histogram of equalized Edge-Ring defect image; (g) histogram of the unequalized Local defect image; (h) histogram of equalized Local defect image; (i) histogram of unequalized Scratch defect image; (j) histogram of equalized Scratch defect image.