About the Authors

E. Montinaro

Roles Conceptualization, Data curation, Formal analysis, Investigation, Methodology, Project administration, Validation, Visualization, Writing – original draft, Writing – review & editing

Affiliation Ecole Polytechnique Fédérale de Lausanne (EPFL), Laboratory for Microsystems, Lausanne, Switzerland

M. Grisi

Roles Data curation, Investigation, Methodology

Affiliation Ecole Polytechnique Fédérale de Lausanne (EPFL), Laboratory for Microsystems, Lausanne, Switzerland

M. C. Letizia

Roles Investigation, Methodology

Affiliation Ecole Polytechnique Fédérale de Lausanne (EPFL), Laboratory for Microsystems, Lausanne, Switzerland

L. Pethö

Roles Investigation, Methodology

Affiliation Swiss Federal Laboratories for Materials Science and Technology (EMPA), Laboratory for Mechanics of Materials and Nanostructures, Thun, Switzerland

M. A. M. Gijs

Roles Methodology

Affiliation Ecole Polytechnique Fédérale de Lausanne (EPFL), Laboratory for Microsystems, Lausanne, Switzerland

R. Guidetti

Roles Methodology

Affiliation University of Modena and Reggio Emilia, Department of Life Sciences, Modena, Italy

J. Michler

Roles Investigation, Methodology

Affiliation Swiss Federal Laboratories for Materials Science and Technology (EMPA), Laboratory for Mechanics of Materials and Nanostructures, Thun, Switzerland

J. Brugger

Roles Funding acquisition, Resources, Supervision, Validation

Affiliation Ecole Polytechnique Fédérale de Lausanne (EPFL), Laboratory for Microsystems, Lausanne, Switzerland

G. Boero

Roles Conceptualization, Data curation, Formal analysis, Investigation, Methodology, Resources, Software, Supervision, Validation, Visualization, Writing – original draft, Writing – review & editing

giovanni.boero@epfl.ch

Affiliation Ecole Polytechnique Fédérale de Lausanne (EPFL), Laboratory for Microsystems, Lausanne, Switzerland

Competing Interests

The authors have declared that no competing interests exist.