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Nanopore Fabrication by Controlled Dielectric Breakdown

Figure 3

Time-to-pore creation as a function of experimental conditions.

a) Semi-log plot of fabrication time of individual nanopores created in 30-nm-thick SiNx membranes in 1 M KCl buffered as indicated, versus the applied voltage and the calculated applied electric field. The number of separate nanopores each data point is averaged over is indicated in parentheses. The vast majority of nanopores plotted are sub-5-nm in size (i.e. <7 nS). b) Semi-log plot of fabrication time versus pH for the data plotted in a). c) Semi-log plot of fabrication time of individual nanopores created in 10-nm-thick SiNx membranes in 1 M Cl-based electrolyte buffered at pH 10 for different cationic species versus the applied voltage and the calculated applied electric field. All 66 nanopores plotted are sub-5-nm in size (i.e. <20 nS).

Figure 3

doi: https://doi.org/10.1371/journal.pone.0092880.g003