About the Authors
- Nils Spengler
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* E-mail: nils.spengler@kit.edu
Affiliations Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology (KIT), Eggenstein-Leopoldshafen, Germany, Freiburg Institute for Advanced Studies (FRIAS), University of Freiburg, Freiburg, Germany
- Jens Höfflin
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Affiliation Laboratory of Simulation, IMTEK–Department of Microsystems Engineering, University of Freiburg, Freiburg, Germany
- Ali Moazenzadeh
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Affiliation Laboratory for Microactuators, IMTEK–Department of Microsystems Engineering, University of Freiburg, Freiburg, Germany
- Dario Mager
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Affiliation Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology (KIT), Eggenstein-Leopoldshafen, Germany
- Neil MacKinnon
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Affiliation Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology (KIT), Eggenstein-Leopoldshafen, Germany
- Vlad Badilita
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Affiliation Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology (KIT), Eggenstein-Leopoldshafen, Germany
- Ulrike Wallrabe
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Affiliation Laboratory for Microactuators, IMTEK–Department of Microsystems Engineering, University of Freiburg, Freiburg, Germany
- Jan G. Korvink
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Affiliations Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology (KIT), Eggenstein-Leopoldshafen, Germany, Freiburg Institute for Advanced Studies (FRIAS), University of Freiburg, Freiburg, Germany
Competing Interests
The authors have declared that no competing interests exist.
Author Contributions
Conceived and designed the experiments: NS JH UW JGK. Performed the experiments: NS JH. Analyzed the data: NS JH. Contributed reagents/materials/analysis tools: AM NM UW JGK. Wrote the paper: NS JH DM NM VB JGK.